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Our Products

Discover the invisible,

as your journey from micro to nano unfolds with SEMIAN.

​제품소개

About

SEMIAN

ROTARY PUMPED SPUTTER  

SMC-12S

Cost-Efficient Model with Automated Vacuum and Ionization Control for Enhanced Convenience and Versatile Functionality  

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Features 

  • Precision Thickness Monitoring: Real-time thickness measurement with 0.1nm resolution using a Quartz Crystal Microbalance (QCM).

  • Convenient 3-Axis Sample Stage: Easily handle samples with a versatile 3-axis stage. 

  • Customizable Vacuum Levels: Adjust vacuum levels to meet specific requirements for precise coating thickness and quality.

  • Intuitive Touch Control: Manage sample movement and rotation effortlessly with an LCD touch screen.

  • Versatile Working Distance: Accommodate various sample sizes and configurations with adjustable working distances from 30mm to 80mm.

  • Auto Shutdown: Automatic vacuum preservation ensures a clean, contaminant-free environment for the next user, facilitating swift startup and consistent results.

Magnetron 
Sputtering  

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Minimizing Target Heat Damage

Our advanced technology uses magnetron methods to minimize heat dam-age to the target material. 

Various Target Compatibility

Semian provides a choice between a standard donut-shaped PT or AU disk target(OD: 40mm/ID:19mm) when you purchase our product. Our sputter head is also compatible with versatile disc sputtering targets ranging in size from 50mm to 57mm, enhancing flexibility in your sputtering processes.

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FTM IntegratedStage 

Auto WD Adjustment for Minimizing Heat Damage and 

Optimized FTM Accuracy 

Discover our FTM Integrated Stage option, designed to address your needs for both heat damage minimization and precise sample handling. When working with extensive or heat-sensitive samples, our automated stage dynamically adjusts Thermal WD (30mm to 80mm) to minimize heat damage, effortlessly returning to its original state after coating completion. Elevate your process with unmatched Film Thickness Monitor (FTM) accuracy, courtesy of our precision sample stage design. This integration ensures seamless movement with the FTM, eliminating the necessity for tool factor adjustments and guaranteeing precise deposition control, regardless of sample height. For added flexibility, you can select between 0-degree and 30-degree sample stage angles.

Specifications 

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